Design for Manufacturability with Advanced Lithography 53 and almost a half of
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Special attention was paid to formulas - couples of Boolean attributes derived from columns of the analysed data matrix
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Design for Manufacturability with Advanced Lithography 53 and almost a half ofThis book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM
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